The digitalcold cathodetransducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range. Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.
描述
Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Easily replaceable sensor heads with stored calibration data
Digital RS485 interface and EtherCAT
应用
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum
技术参数
WEIGHT
0.555 kg
DIMENSIONS
6.9 x 4.8 x 15.3 cm
MEASUREMENT RANGE
2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs.
ACCURACY
2e-3 mbar – 2e-8 mbar: <25% from reading
CATHODE VOLTAGE
Max. 2,5 kV
ELECTRICAL CONNECTION
M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol.
POWER CONSUMPTION
Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD