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The digital cold cathode transducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.

描述

• Cathode sensor is controlled either automatically or manually by the user

• Fast ignition due to a special technology

• Insensitive against inrush of air due to automatic switch-off

• Easily replaceable sensor heads with stored calibration data

• Digital output signal RS485 and EtherCAT

• Robust industrial design, rugged, EMI-proof metal housing

• Low magnetic stray field

应用

• Coating plants and vapor deposition

• Industrial furnaces

• Process engineering

• Analytical instruments

• Sputtering plants

• Measuring and controlling in high vacuum

技术参数

• Coating plants and vapor deposition

• Industrial furnaces

• Process engineering

• Analytical instruments

• Sputtering plants

• Measuring and controlling in high vacuum

vsie.pdf

man_vsi-de-171005.pdf