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Physical

压力传感器类型

640B压力器

641B集成仪表压力控制器

•  640B

•  641B

Pressure Ranges (Full Scales)

压力范围（满刻度）

10, 100, 1000 mmHg (Torr); 60, 100 psi

Transducer Overpressure Limit

传感器过压限值

45 psia or 2x Full Scale, whichever is greater

Orifice Full Scale Ranges

孔板满标度范围

50, 200, 1000,   5000, 10000, 20000, 50000 sccm

 (nominal Full Scale flow rates for N2 with 15 psig on   inlet and atm. on outlet)

Maximum Differential Pressure

(consistent with transducer overpressure limit)

大压差（与传感器过压限值一致）

•  150 psi for 50 to 10,000 sccm orifices

•  30 psi for 20,000 and 50,000 sccm orifices

Control Mode

控制模式

Downstream standard; Upstream optional

Performance 表现

Pressure Reading压力读数精度

  Accuracy Temp. Coefficients临时系数

Time Response时间响应

•  ±0.5% of Reading (includes linearity, hysteresis, and repeatability)

•  Zero: ±0.02% of Full Scale/°C

•  Span: ±0.04% of Reading/°C

• <100 msec

Pressure Control 压力控制装置

 Range 范围

Accuracy 精确

Time Response 时间响应

•  >2 to 99% of Full Scale

•  ±0.2% of Full Scale

• <1.0 sec (excluding system time constant)

Environmental 环境方面

Operating Temperature

0° to 50°C (32° to 122°F)

Storage Temperature

-20° to 80°C (-4° to 176°F)

Electrical与电有关

Power Required

±15 VDC ±5%, 200 mA max.

Input/Output Signals

输入/输出信号

0-5 VDC standard; 0-10 VDC optional

Connector连接器

15-pin male type “D”

Cable Length电缆长度

100 ft. (30 m) max.

RFI Sensitivity

RFI灵敏度

SAMA 33.1, 1-abc:<0.2% of Full Scale

Trip Points

Rated Adjustable Hysteresis Indicators

跳闸点

额定可调滞后指示器

•  Two open-collector transistors

•  250 mA @ 30 VDC

•  1 to 99% of Full Scale

•  3% of Full Scale

•  Green LEDs on when actuated

Compliance 合规性

CE

Mechanical

Materials   Exposed to Gas

接触气体的材料

Standard 标准

Optional可选择的

•  316L S.S., 316L/VAR S.S., Inconel, Nickel

•  Viton®, Kalrez®, Kel-F®

Leak Integrity 泄漏完整性

 External外部的

Internal1,2 (through closed valve)

内部1,2（通过关闭的阀门）

• <10-9 scc/sec He

•  Elastomer valve:<10-4 scc/sec He

•  Metal valve:<1% of Full Scale. (N2 @ 1 atm. ∆P)

•  Kel-F valve:<0.5% of Full Scale (N2 @ 1 atm. ∆P)

Fittings配件

Swagelok® 4 VCR®, 8 VCR, or 1/4” Swagelok, Surface Mount

Dimensions尺寸

1.5'' (38.1   mm) x 4.88'' (124 mm) (4 VCR) x   5.50'' (140 mm) max.

Weight

2.54 lbs. (1.15 kg)