The digital combination transducer VSM(Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.
描述
Wide range sensorPirani/cold cathode
Piraniwith extended range allows operation ofcold cathodeat lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and analog output signal 1.819-8.6 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
应用
Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces
技术参数
WEIGHT
0.555 kg
DIMENSIONS
6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE
Pirani/ invertedmagnetron, both depending on gas type