万喜堂彩票
PSG5xx大气压至中真空真空计INFICON皮拉尼PSG500、PSG502-S、PSG510-S和PSG512-S型标准真空计采用当今市场上的数字皮拉尼技术
INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型标准真空计采用当今市场上的数字皮拉尼技术。 不锈钢传感器单元坚固耐用,结构设计紧凑,适用于半导体系统和标准应用,例如前级真空管。
轻松一键调节 ATM 和 HV
节省空间的坚固设计
铝质壳体
可在任意方向安装
不锈钢测量单元,带金属密封馈入装置
便于集成的对数信号输出
螺纹接头,具有 10 巴过压能力
250 °C 烘烤型
在腐蚀应用中可选购镍丝
陶瓷馈入装置,适用于腐蚀性的应用 (PSG510 & PSG512)
可选设定点
RoHS 合规
高真空电离真空计控制
前级真空压力监控
真空系统中的安全电路
高真空和低真空范围内的一般真空测量和控制
类型 | PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | |
---|---|---|---|---|---|---|
测量原则 | | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani |
精度 (N2) | | | | | | |
1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
可重复性(空气) | | | | | | |
1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
输出信号(测量信号) | | | | | | |
电压范围 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
测量范围 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
测量范围(空气、O2、CO、N2) | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
设定点 | | | | | | |
设定点数量 | | none | 2 | 2 | 2 | 2 |
设置范围 | mbar | ‒ | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
滞后 | % of reading | ‒ | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
继电器触点 | ‒ | 30 | 30 | 30 | 30 | |
继电器触点: 转换时间 | ms | ‒ | <20 | <20 | <20 | <20 |
电源电压 | | | | | | |
真空计上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
波纹 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
电压与压强 | | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade |
内部容积 | | | | | | |
DN 16 ISO-KF,DN 16 CF-R,7/16-20 UNF | cm³ (in.³) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
DN 16 ISO-KF & DN 16 CF-R 长管 | cm³ (in.³) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
1/8'' NPT,4 VCR,8 VCR,1/2'' 管 | cm³ (in.³) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
容许温度 | | | | | | |
运行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
真空连接 (1) | °C | 80 / 250(2) | 80 / 250(2) | 80 / 250(2) | 80 / 250(2) | 80 / 250(2) |
贮存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
重量 | | | | | | |
DN 16 ISO-KF,7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
DN 16 CF-R,4 VCR | g | 100 | 100 | 100 | 100 | 100 |
1/8'' NPT,1/2'' 管 | g | 70 | 70 | 70 | 70 | 70 |
8 VCR,DN 16 ISO-KF 长管 | g | 130 | 130 | 130 | 130 | 130 |
DN 16 CF-R 长管 | g | 140 | 140 | 140 | 140 | 140 |
错误信号 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
输出电阻 | Ω | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
Z小负载电阻 | kΩ | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
反应时间 | ms | 80 | 80 | 80 | 80 | 80 |
真空计识别 | kΩ | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
调整 | | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment |
电流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
电气连接 | | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male |
传感器电缆 | | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding |
电缆长度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
暴露于真空的材料 | | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
单丝 | | W | W | Ni | W | Ni |
容许压力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
安装定位 | | any | any | any | any | any |
保护等级 | | IP40 | IP40 | IP40 | IP40 | IP40 |
(1) 水平安装方向
(2) 长管
PSG500 tungsten | |
---|---|
零件号 | 明细 |
350-060 | 皮拉尼真空计 |
350-061 | PSG500 1/8" NPT |
350-062 | PSG500规管 |
350-063 | PSG500 1/2" Tube |
350-064 | PSG500 8-VCR (1/2") |
350-065 | PSG500 4-VCR (1/4") |
350-066 | PSG500 7/16-20 UNF |
350-067 | PSG500 DN 16 ISO-KF, ext. body |
350-068 | PSG500 DN 16 CF-R, ext. body |
PSG500-S tungsten, setpoints | |
零件号 | 明细 |
350-080 | PSG500-S真空计 |
350-081 | PSG500-S 1/8" NPT |
350-082 | PSG500-S DN 16 CF-R |
350-083 | PSG500-S 1/2" Tube |
350-084 | PSG500-S 8-VCR (1/2") |
350-085 | PSG500-S 4-VCR (1/4") |
350-086 | PSG500-S 7/16-20 UNF |
350-087 | PSG500-S DN 16 ISO-KF, ext. body |
350-088 | PSG500-S DN 16 CF-R, ext. body |
PSG502-S nickel, setpoints | |
零件号 | 明细 |
350-140 | PSG502-S真空计 |
350-141 | PSG502-S 1/8" NPT |
350-142 | PSG502-S DN 16 CF-R |
350-143 | PSG502-S 1/2" Tube |
350-144 | PSG502-S 8-VCR (1/2") |
350-145 | PSG502-S 4-VCR (1/4") |
350-146 | PSG502-S 7/16-20 UNF |
350-147 | PSG502-S DN 16 ISO-KF, ext. body |
350-148 | PSG502-S DN 16 CF-R, ext. body |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
350-200 | PSG510-S DN 16 ISO-KF |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
350-300 | PSG512-S DN 16 ISO-KF |
PSG500 tungsten | |
---|---|
零件号 | 明细 |
211-001 | 卡箍 DN 10-16 ISO-KF |
PSG500-S tungsten, setpoints | |
零件号 | 明细 |
211-001 | 卡箍 DN 10-16 ISO-KF |
PSG502-S nickel, setpoints | |
零件号 | 明细 |
211-001 | 卡箍 DN 10-16 ISO-KF |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
211-001 | 卡箍 DN 10-16 ISO-KF |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
211-001 | 卡箍 DN 10-16 ISO-KF |
PSG500 tungsten | |
---|---|
零件号 | 明细 |
350-920 | PSG500备用传感器 |
350-921 | PSG500 Spare Sensor 1/8" NPT |
350-922 | PSG500 Spare Sensor DN 16 CF-R |
350-923 | PSG500 Spare Sensor 1/2" Tube |
350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
350-925 | PSG500 Spare Sensor 7/16-20 UNF |
350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
PSG500-S tungsten, setpoints | |
零件号 | 明细 |
350-920 | PSG500备用传感器 |
350-921 | PSG500 Spare Sensor 1/8" NPT |
350-922 | PSG500 Spare Sensor DN 16 CF-R |
350-923 | PSG500 Spare Sensor 1/2" Tube |
350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
350-925 | PSG500 Spare Sensor 7/16-20 UNF |
350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
PSG502-S nickel, setpoints | |
零件号 | 明细 |
350-900 | PSG502-S传感器 |
350-901 | PSG502 Spare Sensor 1/8" NPT |
350-902 | PSG502 Spare Sensor DN 16 CF-R |
350-903 | PSG502 Spare Sensor 1/2" Tube |
350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
350-905 | PSG502 Spare Sensor 7/16-20 UNF |
350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
PSG510-S tungsten, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
350-930 | PSG510 Spare Sensor DN 16 KF |
PSG512-S nickel, setpoints, ceramic feedthroughs | |
零件号 | 明细 |
350-940 | PSG512 Spare Sensor DN 16 KF |
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